Photolithography technology

Photolithography technology refers to the technology of transferring the pattern on the mask plate to the substrate with the help of photoresist under the action of light (generally ultraviolet light, deep ultraviolet light, extreme ultraviolet light). The photolithography technology is one of the most important processes in semiconductor manufacturing. The cost is about 1/3 of the whole silicon wafer manufacturing process, and the time consumption accounts for about 40%~60% of the whole silicon wafer manufacturing process. In the field of semiconductor manufacturing, as the line width of semiconductor processing becomes smaller and smaller, the photolithography process is extremely strict on the control of minimal pollutants. It not only strictly controls particles, but also has strict requirements on low precipitates.

Master Filtration uses advanced equipment and processes to produce products with excellent filtration efficiency, cleanliness and chemical resistance to cope with different SEMI photolithography process applications.